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Hexafluoroethane

Hexafluoroethane (FC-116), also known as perfluoroethane, is a colorless, nonflammable and nontoxic gas.

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Hexafluoroethane

Formula: C2F6 or R116, Halocarbon 116

Hexafluoroethane (FC-116), also known as perfluoroethane, is a colorless, nonflammable and nontoxic gas.  Hexafluoroethane is chemically inert and has a very high global warming potential (GWP = 11,100; Greenhouse gas protocol, Fifth Assessment Report AR5).  It is used as an important component in some refrigeration mixtures, and as a reactive ion etching gas in semiconductor materials processing applications.

In semiconductor applications, for example in reactive ion etching, hexafluoroethane with a fluorine to carbon ratio of 3:1 offers a unique source of highly reactive trifluoromethyl radicals without accompanying hydrogen atoms.  As a result, semiconductor material plasma etching processes employing hexafluoroethane are relatively aggressive with respect to fluorine radical formation.  On the other hand, plasmas involving hexafluoroethane are not known for providing good fluorocarbon film formation.  In other applications, hexafluoroethane can be used as a plasma chamber cleaning gas, an expansion agent for polyolefins and polyurethanes, as a propellant for aerosols, as a fire extinguishing agent, and to provide an inert medium in some cases.

 

Please click here for a downloadable Spec PDF

Please click here for a downloadable SDS PDF

Applications

Specifications

Further Specifications

Cylinder Sizes

  • Used as a plasma chamber etching gas
  • Used in the plasma etching process of semiconductors
Grade 4.5 Grade 5
Purity 99.995% 99.999%
Nitrogen <10 ppmv < 5 ppmv
Oxygen < 5 ppmv < 1 ppmv
Carbon Monoxide < 1 ppmv < 1 ppmv
Carbon Dioxide < 2 ppmv < 1 ppmv
Moisture < 5 ppmv < 1 ppmv
Other Organics < 25 ppmv < 1 ppmv
Acidity (HF) < 0.1 ppmv < 0.1 ppmv
Chemical & Physical
Molecular Weight 138.01
Specific Volume 2.8 cu.ft/lb
Pressure @ 70ºF 23.5 psig
Valve Outlet CGA 660/320 DISS 716
Shipping Information
DOT Name Hexafluoroethane
Hazard Class 2.2
DOT No. UN 2193
DOT Label Green, Non-flammable gas
CAS No 76-16-4
Cylinder Size Fill Weight (lbs)
44L/Size 200 95
16L/Size 80 34
7L/Size 35 15

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

*This gas not available for purchase online.