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Trifluoromethane (CHF3) is a colorless, nontoxic, non-flammable gas with a slightly ethereal odor.

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Formula: CHF3 or R32, Halocarbon 23

What is Trifluoromethane?

Trifluoromethane gas is a haloform, a chemical compound with halogen atoms replacing three of the four hydrogen atoms of methane. It is shipped as a liquefied gas under its own vapor pressure (635 psig @ 70° F). Trifluoromethane is a greenhouse gas however it is not an ozone depleter. Contact with liquid may cause frostbite.


Trifluoromethane In Various Industries

Trifluoromethane is used for plasma etching in the semiconductor industry, specifically for silicon oxide and silicon nitride. 

As a resulting byproduct of the manufacture of chlorotrifluoromethane, trifluoromethane is sometimes used as a refrigerant. 

Trifluoromethane has high density, low reactivity, and low toxicity, making it ideal for use in fire suppression systems as a flooding agent.  



Further Specifications

Cylinder Sizes

  • Etching - combined with halocarbon 14 and halocarbon 116 to improve rate, selectivity, and uniformity in etching
  • Refrigeration in closed systems
  • Commercial refrigeration
  • Food processing and cold storage
  • Transport refrigeration
  • Commercial or domestic air conditioning
  • Air- or water-cooled chillers
  • Fire extinguishing agent
  • Chemical intermediate
Grade 3 Grade 3.5 Grade 4.5 Grade 5
Purity 99.9% 99.95% 99.995% 99.999%
Air (N2+O2+CO+CO2) <500 ppmv < 400 ppmv < 30 ppmv < 5 ppmv
Moisture < 10 ppm/w < 10 ppmv < 4 ppmv < 2 ppmv
Other Organics < 1000 ppmv <10 ppmv < 3 ppmv
Methane < 1 ppmv
Acidity (HCL) < 0.1 ppm/w < 0.1 ppm/w < 1 ppm/w < 0.1 ppm/w
Chemical & Physical Properties
Molecular Weight 70.01
Specific Volume 5.5 cu. ft/lb
Pressure @ 70° F 23.5 psig
Valve Outlet CGA 660 CGA 320, DISS 716
Shipping Information
DOT Name Trifluoromethane
Hazard Class 2.2
DOT No. UN 1984
DOT Label Green, Non-Flammable Gas
CAS No. 75-46-7
Cylinder Size Fill Weight (lbs)
44L/Size 200 70
16L/Size 80 25
7L/Size 35 11

FAQs about Trifluoromethane

Where is trifluoromethane found?

Trifluoromethane is a result of a reaction of chloroform and hydrogen fluoride. It is produced industrially in the manufacture of Teflon. Biologically it is generated by the process of decarboxylation of trifluoroacetic acid.

Is trifluoromethane hazardous?

Trifluoromethane is classified as hazardous under OSHA regulations in the United States and the WHMIS in Canada. It is moderately toxic when inhaled but may cause oxygen displacement and asphyxiation and may also be narcotic in high concentrations. Also, under prolonged exposure to fire or heat, the containers may rupture and rocket.

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

*This gas not available for purchase online.