C4H10 or R600A
C5H12 or R601A
Ne
NO
NO2
NF3
N2O
C4F8 or R318, Halocarbon 318
C3F8 or R218, Halocarbon 218, Perfluoropropane
PH3
C3H4
C3H8 or R290
C3H6
SiH4
SiF4