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Sulfur Hexafluoride

Sulfur Hexafluoride (SF6) is a colorless, odorless, non-toxic liquefied gas. Shipped as a liquid under its own vapor pressure.

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Sulfur Hexafluoride

Formula: Formula: SF6 or SF6

SF6 has chemical properties that make it useful across a range of industries. SF6 is widely used in the electrical industry as a gaseous dielectric medium for insulating and arc quenching in switch gear, substations and gas insulated power lines.  For this application it is superior to many other substances due to its insulation properties, dielectric strength, and arc quenching abilities.  We provide SF6 that meets IEC 376 and ASTM D2472-00 standards for this application.


In a similar application SF6 can be used in waveguides for high-power microwave systems.  Pressurizing the waveguide with the SF6 will electrically insulate and prevent internal arcing. And SF6 is used as a cover gas to protect molten reactive metals including magnesium.  Here the SF6 protects the hot metals from atmospheric oxygen, preventing oxidation and burning of the metal. Sulfur hexafluoride is also used for deep ion plasma etching in the production of semiconductors.  SF6 will produce reactive ions and radicals in the plasma. SF6 placed between the panes of a double-pane window, will thermally insulate, and will acoustically insulate (reducing the sound transmitted).  This is of value for homes and business in noisy areas, or for offices and conference rooms where privacy is desired.


Tires filled with SF6 will deflate more slowly due to the large molecule size. Sulfur hexafluoride is used as a medical contrasting agent for ultrasound imaging.  Sulfur hexafluoride microbubbles in solution are injected in vein.  These microbubbles make blood vessels more visible to ultrasound.  Retina surgery uses an SF6 tamponade in the form of a bubble.


Please click here for a downloadable Spec PDF

Please click here for a downloadable SDS PDF



Further Specifications

Cylinder Sizes

  • plasma etching prior to chemical vapor deposition (CVD)
Grade 3 Grade 4 Grade 5
Purity 99.9% 99.99% 99.999%
Nitrogen < 40 ppmv < 5 ppmv
Oxygen < 10 ppmv < 2 ppmv
Air (N2+O2) < 400 ppmv
CF4 < 100 ppmv < 15 ppmv < 5 ppmv
Water < 8 ppmv < 8 ppmv < 2 ppmv
Acidity (HF) < 1 ppm/w < 0.5 ppm/w < 0.1 ppm/w
Chemical & Physical Properties
Molecular Weight 146.05 cu.ft/lb
Specific Volume 2.65 cu.ft/lb
Pressure @ 70º F 23.5 psig
Valve Outlet CGS 590 DISS 716
Shipping Information
DOT Name Sulfur Hexafluoride
Hazard Class 2.2
DOT No. UN 1080
DOT Label Green, Non-flammable gas
CAS no. 2551-62-4
Cylinder Size Fill Weight (lbs)
44L/Size 200 115
16L/Size 80 35
7L/Size 35 18

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

*This gas not available for purchase online.