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Silicon Tetrafluoride

Silicon Tetrafluoride (SiF4) is a colorless, corrosive, non-flammable, toxic gas.

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Silicon Tetrafluoride

Formula: SiF4

Silicon Tetrafluoride (SiF4) is a colorless, corosive, non-flammable, toxic gas.


Please click here for a downloadable Spec PDF

Please click here for a downloadable SDS PDF



Further Specifications

Cylinder Sizes

  • used in the manufacturing of fluosilicic acid and its salts.
Grade 4
Purity 99.99%
Nitrogen < 3 ppmv
Oxygen + Argon < 1 ppmv
Carbon Dioxide < 1 ppmv
Carbon Monoxide < 0.5 ppmv
Methane < 10 ppmv
Hydrogen Fluoride < 50 ppmv
Arsenic < 0.5 ppmv
Boron < 0.5 ppmv
Phosphorus < 0.5 ppmv
Chemical & Physical Properties
Molecular Weight 104.8
Specific Volume 3.7 cu. ft/lb
Pressure @ 70°F 1000 psig
Valve Outlet CGA 330 DISS 642
Shipping Information
DOT Name Silicon Tetrafluoride
Hazard Class 2.3
DOT No. UN 1859
DOT Label Poison Gas, Corrosive
CAS No. 7783-61-1
Cylinder Size Fill Weight (lbs)
44L/Size 200 50

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

**RFO available

*This gas not available for purchase online.