Formula: C3F8 or R218, Halocarbon 218, Perfluoropropane
Octafluoropropane (FC-218), also known as perfluoropropane, is a colorless, nonflammable and nontoxic gas. Octafluoropropane is chemically inert and has a moderately high global warming potential (GWP = 8,900; Greenhouse gas protocol, Fifth Assessment Report AR5). It is used as an important component in some refrigeration mixtures, and as a reactive ion etching gas in semiconductor materials processing applications.
In semiconductor applications, for example in reactive ion etching, octafluoropropane, with a fluorine to carbon ratio of 8:3 offers a combined source of highly reactive trifluoromethyl, difluorocarbenyl and fluorine radicals without accompanying hydrogen atoms. As a result, semiconductor material plasma etching processes employing octafluoropropane are relatively aggressive with respect to fluorine radical formation. On the other hand, plasmas involving octafluoropropane are not known for providing good fluorocarbon film formation. In other applications, octafluoropropane can be used as a plasma chamber cleaning gas, an expansion agent for polyolefins and polyurethanes, as a propellant for aerosols, as a fire extinguishing agent, and as a gaseous dielectric insulating medium.
- Used in plasma etching
|Grade 3.6||Grade 3.7||Grade 4|
|Nitrogen||< 200 ppmv||< 145 ppmv||< 40 ppmv|
|Oxygen||< 50 ppmv||< 50 ppmv||< 10 ppmv|
|Carbon Monoxide||< 5 ppmv||< 5 ppmv|
|Carbon Dioxide||< 10 ppmv||< 11 ppmv||<5 ppmv|
|Moisture||< 10 ppmv||< 6 ppmv||< 10 ppmv|
|Other Halocarbons||< 100 ppmv||< 400 ppmv||< 40 ppmv|
|Light Gases||< 200 ppmv|
|Acidity||< 0.1 ppmvw||< 0.1 ppmw|
|Chemical & Physical Properties|
|Specific Volume||2.02 cu.ft/lb|
|Pressure @ 70ºF||23.5 psig|
|Valve Outlet||CGA 660 DISS 716|
|DOT No.||UN 2424|
|DOT Label||Green, Non-flammable gas|
|Cylinder Size||Fill Weight (lbs)|
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
*This gas not available for purchase online.