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Octafluoropropane (FC-218), also known as perfluoropropane, is a colorless, nonflammable and nontoxic gas. 

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Formula: C3F8 or R218, Halocarbon 218, Perfluoropropane

What is Octafluoropropane?


Octafluoropropane (FC-218), also known as perfluoropropane, is a colorless, non-flammable, and nontoxic gas. Octafluoropropane is chemically inert and has a moderately high global warming potential (GWP = 8,900; Greenhouse gas protocol, Fifth Assessment Report AR5). It is used as an important component in some refrigeration mixtures and as a reactive ion etching gas in semiconductor materials processing applications.

In semiconductor applications, for example, in reactive ion etching, octafluoropropane, with a fluorine to carbon ratio of 8:3, offers a combined source of highly reactive trifluoromethyl, difluorocarbenyl and fluorine radicals without accompanying hydrogen atoms. As a result, semiconductor material plasma etching processes employing octafluoropropane are relatively aggressive with respect to fluorine radical formation. On the other hand, plasmas involving octafluoropropane are not known for providing good fluorocarbon film formation. In other applications, octafluoropropane can be used as a plasma chamber cleaning gas, an expansion agent for polyolefins and polyurethanes, as a propellant for aerosols, as a fire extinguishing agent, and as a gaseous dielectric insulating medium.


Please click here for a downloadable Spec PDF

Please click here for a downloadable SDS PDF



Further Specifications

Cylinder Sizes

  • Used in plasma etching
  • Used in contrast-enhanced ultrasound
  • Used as a component of refrigeration mixtures in various industries
Grade 3.6 Grade 3.7 Grade 4
Purity 99.96% 99.97% 99.99%
Nitrogen < 200 ppmv < 145 ppmv < 40 ppmv
Oxygen < 50 ppmv < 50 ppmv < 10 ppmv
Carbon Monoxide < 5 ppmv < 5 ppmv
Carbon Dioxide < 10 ppmv < 11 ppmv <5 ppmv
Moisture < 10 ppmv < 6 ppmv < 10 ppmv
Other Halocarbons < 100 ppmv < 400 ppmv < 40 ppmv
Light Gases < 200 ppmv
Acidity < 0.1 ppmvw < 0.1 ppmw
Chemical & Physical Properties
Molecular Weight 188.02
Specific Volume 2.02 cu.ft/lb
Pressure @ 70ºF 23.5 psig
Valve Outlet CGA 660 DISS 716
Shipping Data
DOT Name Octafluoropropane
Hazard Class 2.2
DOT No. UN 2424
DOT Label Green, Non-flammable gas
CAS No. 76-19-7
Cylinder Size Fill Weight (lbs)
44L/Size 200 100
16L/Size 80 35
7L/Size 35 15

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

*This gas not available for purchase online.