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Octafluorocyclobutane

Octafluorocyclobutane is a colorless, odorless, non-flammable liquefied gas. It is shipped as a liquefied gas under its own vapor pressure.

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Octafluorocyclobutane

Formula: C4F8 or R318, Halocarbon 318

Octafluorocyclobutane is a colorless, odorless, non-flammable liquefied gas. It is shipped as a liquefied gas under its own vapor pressure (25 psig @ 70º F). C4F8, also identified as Refrigerant-C318, is used in some specialty refrigeration applications.

Octafluorocyclobutane can be used as an extinguishing agent in fire suppression systems.  This is due the large total heat absorbed in going from the fluid at room temperature up to a temperature of 1400 K. And, C4F8 is used in semiconductor manufacturing for plasma etching.  In the RF field C4F8 generates reactive species that selectively etch silicon.  In the etching process the C4F8 plasma free radicals can form a protective polymer that blocks chemical attack on features and can provide sidewall protection.

 

Please click here for a downloadable SDS PDF

Applications

Specifications

Further Specifications

Cylinder Sizes

  • plasma etching
Grade 3 Grade 3.8 Grade 4.5 Grade 5
Purity 99.9% 99.98% 99.995% 99.999%
Nitrogen < 80 ppmv < 8 ppmv < 3 ppmv
Oxygen < 20 ppmv < 2 ppmv < 1 ppmv
Air (N2+O2+CO+CO2) < 300 ppmv
Moisture < 10 ppmv < 10 ppmw < 3 ppmw < 1 ppmw
Tetrafluorocarbons < 50 ppmv
Other Fluorocarbons < 50 ppmv < 10 ppmv < 4 ppmv
Other Organics < 1000 ppmv
Acidity < 0.1 ppmv/w < 0.1 ppmv/w < 0.1 ppmv/w
Chemical & Physical Properties
Molecular Weight 200.03
Specific Volume 1.85 cu.ft/lb
Pressure @ 70º F 23.5 psig
Valve Outlet CGA 660 DISS 716
Shipping Data
DOT Name Octafluorocyclobutane
Hazard Class 2.2
DOT No. UN 1976
DOT Label Green, Non-flammable gas
CAS No. 115-25-3
Cylinder Size Fill Weight (lbs)
44L/Size 200 100
16L/Size 80 35
7L/Size 35 15

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

*This gas not available for purchase online.