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Nitrogen Trifluoride

Nitrogen Trifluoride is a colorless, non-flammable, corrosive gas.

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Nitrogen Trifluoride

Formula: NF3

Nitrogen trifluoride (NF3) is an inorganic, colorless, non-flammable, toxic gas with a slightly musty odor. It is primarily used to remove silicon and silicon-compounds during the manufacturing of semiconductor devices such as LCD displays, some thin-film solar cells, and other microelectronics. Unlike the fluorinated carbons, Nitrogen Trifluoride is easy to decompose due to relatively low bond energy in N—F bond, and therefore can be a fluorine source.

NF3 has the ability to act as a stable fluorinating agent and has a wide application scope in high-energy laser at dry etching in semiconductor production as a filling gas in lamps to prolong their durability and increase brightness, as well as a detergent gas in CVD apparatus. For all these reasons, nitrogen trifluoride is increasingly used in the electronics industry, primarily for the etching of microcircuits, and for manufacturing of liquid crystal flat panel displays and thin film PV cells.

Once NF3 is released into the atmosphere, it circulates from the surface to the stratosphere hundreds of times before it is destroyed by solar ultraviolet radiation. It is nearly chemically inert in the atmosphere, and the average lifetime of an NF3 molecule in the atmosphere is about 550 years.

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Applications

Specifications

Further Specifications

Cylinder Sizes

  • Used as an etchant in microelectronics
  • Used as key chemical agent used to manufacture certain types of photovoltaic cells for solar panels
Grade 2.7 Grade 4 Grade 4.5
Purity 99.7% 99.99% 99.995%
Oxygen < 10 ppmv < 5 pmmv
Oxygen and Argon < 700 ppmv
Nitrogen < 700 ppmv < 10 ppmv < 5 ppmv
Carbon Dioxide < 25 ppmv < 10 ppmv < 3 ppmv
Carbon Monoxide < 25 ppmv < 0.5 ppmv
Water < 1 ppmv < 1 ppmv < 1 ppmv
Carbon Tetrafluoride < 1,500 ppmv < 40 ppmv < 25 ppmv
Nitrous Oxide < 50 ppmv < 10 ppmv < 2 ppmv
Acidity (HF) < 1 ppmv < 5 ppmv < 1 ppmv
Sulfur Hexafluoride < 50 ppmv < 1 ppmv
Chemical & Physical Properties
Molecular Weight 71.00
Specific Volume 5.4 cu.ft/lb
Pressure @ 70°F 1450 psig
Valve Outlet CGA 670 DISS 640
Shipping Information
DOT Name Nitrogen Trifluoride
Hazard Class 2.2
DOT No. UN 2451
DOT Label Non-Flammable Gas and Oxidizer
CAS No. 7783-54-2
Cylinder Size Fill Weight (lbs)
44L/Size 300 50
44L/Size 200 44

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

*This gas not available for purchase online.