Methyl Fluoride
Formula: CH3F or Halocarbon 41
Methyl fluoride is used as a propellant in a mixture with other nonflammable propellants.
Methyl fluoride is used as an etch gas for semiconductor manufacturing including in front-end process for producing flash memory chips.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Used as a propellant in a mixture with other nonflammable propellants
- For physico-chemical study of the C-F bond
| Grade 4 | Grade 4.5 | |
|---|---|---|
| Purity | 99.99% | 99.995% |
| Nitrogen | < 70 ppmv | < 20 ppmv |
| Oxygen | < 20 ppmv | << 5 ppmv |
| Carbon Dioxide | < 10 ppmv | |
| Carbon Monoxide | < 10 ppmv | |
| Methane | < 5 ppmv | |
| Water | < 10 ppmv | < 2 ppmv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 34 |
| Specific Volume | 11.36 cu.ft/lb |
| Pressure @ 70° F | 538 psig |
| Valve Outlet | CGA 350 DISS 724 |
| Shipping Information | |
|---|---|
| DOT Name | Methyl Fluoride |
| Hazard Class | 2.1 |
| DOT No. | UN 2810 |
| DOT Label | Flammable Gas |
| CAS No. | 593-53-3 |
| Cylinder Size | Fill Weight (lbs) |
|---|---|
| 44L/Size 200 | 18 |
| 16L/Size 80 | 7 |
| 7L/Size 35 | 3 |
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
This product is analyzed liquid phase.
*This gas not available for purchase online.