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Methyl Fluoride

Methyl Fluoride is a colorless, flammable gas.

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Methyl Fluoride

Formula: CH3F or Halocarbon 41

Methyl fluoride is used as a propellant in a mixture with other nonflammable propellants.

Methyl fluoride is used as an etch gas for semiconductor manufacturing including in front-end process for producing flash memory chips.

 

Please click here for a downloadable Spec PDF

Please click here for a downloadable SDS PDF

Applications

Specifications

Further Specifications

Cylinder Sizes

  • Used as a propellant in a mixture with other nonflammable propellants
  • For physico-chemical study of the C-F bond
Grade 4 Grade 4.5
Purity 99.99% 99.995%
Nitrogen < 70 ppmv < 20 ppmv
Oxygen < 20 ppmv << 5 ppmv
Carbon Dioxide < 10 ppmv
Carbon Monoxide < 10 ppmv
Methane < 5 ppmv
Water < 10 ppmv < 2 ppmv
Chemical & Physical Properties
Molecular Weight 34
Specific Volume 11.36 cu.ft/lb
Pressure @ 70° F 538 psig
Valve Outlet CGA 350 DISS 724
Shipping Information
DOT Name Methyl Fluoride
Hazard Class 2.1
DOT No. UN 2810
DOT Label Flammable Gas
CAS No. 593-53-3
Cylinder Size Fill Weight (lbs)
44L/Size 200 18
16L/Size 80 7
7L/Size 35 3

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
This product is analyzed liquid phase.

*This gas not available for purchase online.