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Boron Trichloride

Boron Trichloride is a colorless, corrosive gas. It is shipped as a liquefied gas.

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Boron Trichloride

Formula: BCl3

Boron Trichloride is a liquified gas that decomposes in water to hydrogen chloride and boric acid. It is the main gas composition in High-K and metal anisotropic plasma etch, atomic layer etch, and pulsed plasm etch. BCL3 is also mainly used for fine etching of aluminum circuits in the manufacturing process of LCD panels.

Gaseous ammonia was first isolated by Joseph Priestley in 1774 and was termed by him “alkaline air”. Eleven years later, in 1785, Claude Louis Berthollet ascertained its composition. Boron trichloride is a starting material for the production of elemental boron. It is also used in the refining of aluminium, magnesium, zinc, and copper alloys to remove nitrides, carbides, and oxides from molten metal.

It has been used as a soldering flux for alloys of aluminium, iron, zinc, tungsten, and monel. Aluminum castings can be improved by treating the melt with boron trichloride vapors. In the manufacture of electrical resistors, a uniform and lasting adhesive carbon film can be put over a ceramic base using BCl3. It has been used in the field of high energy fuels and rocket propellants as a source of boron to raise BTU value.



Further Specifications

Cylinder Sizes

  • Applied as dopant in ion implantation
  • Used as flux for soldering magnesium
Grade 4.5 Grade 5 Grade 5.5
Purity 99.995% 99.999% 99.9995%
Oxygen < 9 ppmv < 1 ppmv < 0.5 ppmv
Nitrogen < 30 ppmv < 4 ppmv < 0.5 ppmv
Carbon Dioxide < 5 ppmv < 2 ppmv < 0.5 ppmv
Carbon Monoxide < 3 ppmv < 0.5 ppmv < 0.3 ppmv
Methane < 1 ppmv < 0.5 ppmv < 0.5 ppmv
Chlorine <1 ppmv < 1 ppmv < 0.1 ppmv
Phosgene < 0.1 ppmv
Hydrogen Chloride < 1 ppmv
Silicon Tetrachloride < 2 ppmv
Chemical & Physical Properties
Molecular Weight 117.17
Sp. Volume 3.3 cu.ft/lb
Pressure @ 70°F 4.4 psig
Valve Outlet CGA 660 DISS 634
Shipping Information
DOT Name Boron Trichloride
Hazard Class 2.3
DOT No. UN 1741
DOT Label Poison Gas/Inhalation Hazard, Corrosive Gas
CAS No. 10294-34-5
Cylinder Size
44L/Size 200 110/100/70/40
2L/Size 10 5

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

*This gas not available for purchase online.