is a colorless, odorless, flammable liquefied gas.
Years of research have shown that C4F6 (H-2316) presents several advantages for dry etching of oxide-based materials:
- It has a higher etch rate and selectivity than octafluorocyclobutane (c-C4F8 – H318), another extensively used etchant for silicon oxide. Unlike C4F8 (H318), with C4F6 (H2316), only the dielectric substrate is etched.
- The etched structure has a higher aspect ratio, leading to narrower trenches compared to c-C4F8.
- VOC emissions are reduced: C4F6 (H2316) has low global warming potential because it has a much shorter lifetime in the atmosphere.
Where to buy C4F6?
Electronic Fluorocarbons provides C4F6 (H2316) at high purity levels: 99.9% and 99.99%. We ship hexafluoro-1,3-butadiene as a pure liquefied gas in three cylinder sizes for the semiconductor industries to meet all of your customer’s needs. For additional information or to start your order call 1-888-924-3371 or email us at firstname.lastname@example.org.
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