Request a Quote

Please fill out the form and submit it to us. One of our sales representatives will contact you.


Contact Us Directly

If you would like to speak directly to one of our sales associates, please contact us through the details below.

Corporate Address
P.O. Box 759
Hopkinton, MA 01748
Tel. 508-435-7700
Fax. 508-625-1368
Plant Address
3266 Bergey Road
Hatfield PA 19440
Tel. 215-443-9600
Fax. 215-443-2665

For product information please e-mail:
sales@efgases.com

COVID-19 Updates

Have More Security in Your C4F8  Gas Supply Chain

C4F8 Gas Distillation Column

 

A Leader in C4F8 Gas Production for Semiconductor Community

As the largest producer of high-purity perfluorocarbon compounds (PFC) in North America, Electronic Fluorocarbons is focused on serving the needs of the semiconductor community. We’ve adjusted our processes to be a leader in C4F8 gas production.

We serve the semiconductor market by developing a new generation of PFCs with the highest quality to meet the tight specification requirements of the semiconductor industry. Our ISO 9001:2015 specialty gas plant has complete in-house analytical capability to track impurity profiles and produce the highest quality product.

In dry etching processes, Cyclo-C4F8 or R318, Halocarbon 318, a perfluorocarbon compound is commonly used as a reactant gas in the etching of oxide and nitride. As chip density increases, dry etching requires greater precision and selectivity in deep aspect ratios and tight geometries. To achieve this, octafluorocyclobutane (c-C4F8) is widely used as an etching gas instead of conventional CF4, because the relatively high C/F ratio of C4F8 induces the formation of a C:F film on Si or SiN, which acts as an etching barrier, thus improving the selectivity.  

More C4F8 Gas Capability With Our Thirty-Foot Distillation Column

Electronic Fluorocarbons has doubled its capacity to produce C4F8 and implemented quality improvements to ensure its highest purity through the construction of a dedicated thirty-foot distillation column. This in-house storage of raw material creates shorter lead times and allows for further streamlining of the purification process. For customers with a well-established business continuity plan, we guarantee that our domestic on-hand product provides security in the supply chain

new Agilent GC-PDHID analytical instrument enables Electronic Fluorocarbons to provide various grades of the product ranging from 99.9% – 99.999% (3N-5N) purity. These high purity product lines support not only our electronic customers but applications of C4F8 gas in other non-semiconductor industries. 

Octafluorocyclobutane C4F8 gas has been broadly adapted in the semiconductor industry as a CVD (Chemical Vapor Deposition) chamber clean chemistry, replacing C2F6. Chamber clean chemistries using C4F8 as a replacement for C2F6 have a higher utilization rate and subsequently a lower emission of PFC (perfluorocarbons) from the semiconductor process tools. 

Octafluorocyclobutane is a colorless, odorless, non-toxic, non-flammable liquefied gas. It is shipped as a liquefied gas under its own vapor pressure (25 psig @ 70º F). To find full specs, or to download our SDS, click here

EFC C4F8 Gas Specifications (5N)

C4F8 Gas Specifications (5N)