Formula: CHF3
or R23, Halocarbon 23
Trifluoromethane is a colorless, nontoxic, non-flammable gas with a slightly ethereal odor. Contact with liquid may cause frostbite. It is shipped as a liquefied gas under its own vapor pressure (635 psig @ 70° F).
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Applications
Applications of trifluoromethane include the following:
- It’s often used in combination with halocarbon 14 and halocarbon 116 to improve etching rate and selectivity and uniformity in etching
- Used for refrigeration in closed systems; in commercial refrigeration, food processing & cold storage, transport refrigeration, commercial or domestic air conditioning, air- or water-cooled chillers
- Also used as a fire extinguishing agent
- A chemical intermediate
| Grade 3 | Grade 3.5 | Grade 4.5 | Grade 5 | |
|---|---|---|---|---|
| Purity | 99.9% | 99.95% | 99.995% | 99.999% |
| Air (N2+O2+CO+CO2) | < 500 ppmv | < 400 ppmv | < 30 ppmv | <5 ppmv |
| Moisture | < 10 ppm/w | < 10 ppmv | < 4 ppmv | < 2 ppmv |
| Other Organics | < 1000 ppmv | < 10 ppmv | < 3 ppmv | |
| Methane | < 1 ppmv | |||
| Acidity (HCL) | < 0.1 ppm/w | < 0.1 ppm/w | < 1 ppm/w | < 0.1 ppm/w |
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
| Chemical & Physical Properties | |
| Molecular Weight | 70.01 |
| Specific Volume | 5.5 cu. ft/lb |
| Pressure @ 70° F | 635 psig |
| Valve Outlet | CGA 660 CGA 320, DISS 716 |
| Shipping Information | |
| DOT Name | Trifluoromethane |
| Hazard Class | 2.2 |
| DOT No. | UN 1984 |
| DOT Label | Green, Non-Flammable Gas |
| CAS No. | 75-46-7 |
| Cylinder Size | Fill Weight (lbs) |
| 44L/Size 200 | 70 |
| 16L/Size 80 | 25 |
| 7L/Size 35 | 11 |
*This gas not available for purchase online.
