Octafluoropropane is a colorless, nonflammable gas with a faintly sweet odor. It is shipped as a liquefied gas under its own vapor pressure (100 psig @ 70º F).
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Halocarbon 218 is used for plasma etching. The chemical composition of halocarbon 218 supplies a higher ratio of fluorine to carbon than any of the other halocarbon gases supplied by Electronic Fluorocarbons, LLC. When halocarbon 218 is exposed to the RF field generated in the etching process, a gas plasma is produced that will etch silicon dioxide or silicon nitrite with exellent selectivity.
|Grade 3.6||Grade 3.7||Grade 4|
|Nitrogen||< 200 ppmv||< 145 ppmv||< 40 ppmv|
|Oxygen||< 50 ppmv||< 50 ppmv||< 10 ppmv|
|Carbon Monoxide||< 5 ppmv||< 5 ppmv|
|Carbon Dioxide||< 10 ppmv||< 11 ppmv||< 5 ppmv|
|Moisture||< 10 ppmw||< 6 ppmw||< 10 ppmw|
|Other Halocarbons||< 100 ppmv||< 400 ppmv||< 40 ppmv|
|Light Gases||< 200 ppmv|
|Acidity||< 0.1 ppmv/w||< 0.1 ppmv/w|
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
|Chemical & Physical Properties|
|Specific Volume||2.02 cu.ft/lb|
|Pressure @ 70ºF||100 psig|
|Valve Outlet||CGA 660
|DOT Label||Green, Non-flammable gas|
|Cylinder Size||Fill Weight (lbs)|
*This gas not available for purchase online.