Formula: C4F8
or R318, Halocarbon 318
Octafluorocyclobutane is a colorless, odorless, non-flammable liquefied gas. It is shipped as a liquefied gas under its own vapor pressure (25 psig @ 70º F).
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Applications
Halocarbon 318 is used for plasma etching. When it is exposed to the RF field generated in the etching process, a gas plasma is produced that will etch silicon compounds with excellent selectivity.
| Grade 3 | Grade 3.8 | Grade 4.5 | Grade 5 | |
|---|---|---|---|---|
| Purity | 99.9% | 99.98% | 99.995% | 99.999% |
| Nitrogen | < 80 ppmv | < 8 ppmv | < 3 ppmv | |
| Oxygen | < 20 ppmv | < 2 ppmv | < 1 ppmv | |
| Air (N2+O2+CO+CO2) | < 300 ppmv | |||
| Moisture | < 10 ppmv | < 10 ppmw | < 3 ppmw | < 1 ppmw |
| Tetrafluorocarbons | < 50 ppmv | |||
| Other Fluorocarbons | < 50 ppmv | < 10 ppmv | < 4 ppmv | |
| Other Organics | < 1000 ppmv | |||
| Acidity | < 0.1 ppmv/w | < 0.1 ppmv/w | < 0.1 ppmv/w |
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
| Chemical & Physical Properties | |
| Molecular Weight | 200.03 |
| Specific Volume | 1.85 cu.ft/lb |
| Pressure @ 70º F | 25 psig |
| Valve Outlet | CGA 660 DISS 716 |
| Shipping Data | |
| DOT Name | Octafluorocyclobutane |
| Hazard Class | 2.2 |
| DOT No. | UN 1976 |
| DOT Label | Green, Non-flammable gas |
| CAS No. | 115-25-3 |
| Cylinder Size | Fill Weight (lbs) |
| 44L/Size 200 | 100 |
| 16L/Size 80 | 35 |
| 7L/Size 35 | 15 |
*This gas not available for purchase online.
