Trifluoromethane is a colorless, nontoxic, non-flammable gas with a slightly ethereal odor. Contact with liquid may cause frostbite. It is shipped as a liquefied gas under its own vapor pressure (635 psig @ 70° F).
Applications of trifluoromethane include the following:
- It’s often used in combination with halocarbon 14 and halocarbon 116 to improve etching rate and selectivity and uniformity in etching
- Used for refrigeration in closed systems; in commercial refrigeration, food processing & cold storage, transport refrigeration, commercial or domestic air conditioning, air- or water-cooled chillers
- Also used as a fire extinguishing agent
- A chemical intermediate
|Grade 3||Grade 3.5||Grade 4.5||Grade 5|
|Air (N2+O2+CO+CO2)||< 500 ppmv||< 400 ppmv||< 30 ppmv||<5 ppmv|
|Moisture||< 10 ppm/w||< 10 ppmv||< 4 ppmv||< 2 ppmv|
|Other Organics||< 1000 ppmv||< 10 ppmv||< 3 ppmv|
|Methane||< 1 ppmv|
|Acidity (HCL)||< 0.1 ppm/w||< 0.1 ppm/w||< 1 ppm/w||< 0.1 ppm/w|
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
|Chemical & Physical Properties|
|Specific Volume||5.5 cu. ft/lb|
|Pressure @ 70° F||635 psig|
|Valve Outlet||CGA 660
CGA 320, DISS 716
|DOT No.||UN 1984|
|DOT Label||Green, Non-Flammable Gas|
|Cylinder Size||Fill Weight (lbs)|