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Formula: SF6 or SF6

Sulfur Hexafluoride (SF6) is a colorless, odorless, non-toxic liquefied gas. Shipped as a liquid under its own vapor pressure.

Applications

Sulfur Hexafluoride (SF6) is used for plasma etching prior to chemical vapor deposition (CVD). These processes include oxide etching, nitride etching and wafer cleaning. Sulfur Hexafluoride gas, which is itself inert, disassociates in the presence of an RF field to form reactive fluorine ions. These highly reactive ions are excellent for etching tungsten and tungsten silicide films.

Grade 3 Grade 4 Grade 4.5 Grade 5
Purity 99.9% 99.99% 99.995% 99.999%
Nitrogen  < 40 ppmv  < 20 ppmv < 5 ppmv
Oxygen  < 10 ppmv  < 10 ppmv  < 2 ppmv
Air (N2+O2)  < 400 ppmv
CF4 < 400 ppmv < 15 ppmv < 15 ppmv < 5 ppmv
Water  < 8 ppmv  < 8 ppmv  < 5 ppmv  < 2 ppmv
Acidity (HF)  < 0.3 ppm/w  < 0.3 ppm/w  < 0.1 ppm/w  < 0.1 ppm/w

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

Chemical & Physical Properties
Molecular Weight 146.05
Specific Volume 2.65 cu.ft/lb
Pressure @ 70 deg 298 psig
Valve Outlet CGS 590
DISS 716

 

Shipping Information
DOT Name Sulfur Hexafluoride
Hazard Class 2.2
DOT No. UN 1080
DOT Label Green, Non-flammable gas
CAS No. 2551-62-4

 

Cylinder Size Fill Weight (lbs)
44L/Size 200 115
16L/Size 80 35
10L/Size 60 22
7L/Size 35 18