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Formula: SiH4

Silane is a colorless, flammable gas with a sharp smell.

Applications

Silane in a semiconductor grade offers a source of high purity silicon for epitaxial and thin film deposits, and for the formation of high purity silicon oxides.

 

 

Grade 6
Purity 99.9999%
Nitrogen  < 0.5 ppmv
Oxygen + Argon  < 0.06 ppmv
Carbon Dioxide  < 0.05 ppmv
Carbon Monoxide  < 0.08 ppmv
Hydrogen  < 20 ppmv
Water  < 0.5 ppmv
Helium  < 1 ppmv
Methane  < 0.04 ppmv
THC (Sum of C2-C4)  < 0.1 ppmv
Total Chlorosilanes  < 0.1 ppmv
Disilane  < 0.5 ppmv
Disiloxane  < 0.5 ppmv
Resistivity, N-Type  > 10,000

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

Chemical & Physical Properties
Molecular Weight 32.12
Specific Volume 12.1 cu. ft/lb
Pressure @ 70°F 275-1250 psig
Valve Outlet CGA 350
DISS 632

 

Shipping Information
DOT Name Silane
Hazard Class 2.1
DOT No. UN 2203
DOT Label Flammable Gas
CAS No. 7803-62-5

 

 

Cylinder Size Fill Weight (lbs)
44L/Size 200 22
150 AL 11

**RFO available