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Formula: C3F8 or R218, Halocarbon 218, Perfluoropropane

Octafluoropropane is a colorless, nonflammable gas with a faintly sweet odor. It is shipped as a liquefied gas under its own vapor pressure (100 psig @ 70º F).

Applications

Halocarbon 218 is used for plasma etching. The chemical composition of halocarbon 218 supplies a higher ratio of fluorine to carbon than any of the other halocarbon gases supplied by Electronic Fluorocarbons, LLC. When halocarbon 218 is exposed to the RF field generated in the etching process, a gas plasma is produced that will etch silicon dioxide or silicon nitrite with exellent selectivity.

Grade 3.6 Grade 3.7 Grade 4
Purity 99.96% 99.97% 99.99%
Nitrogen  < 200 ppmv  < 145 ppmv  < 40 ppmv
Oxygen  < 50 ppmv  < 50 ppmv  < 10 ppmv
Carbon Monoxide  < 5 ppmv  < 5 ppmv
Carbon Dioxide  < 10 ppmv  < 11 ppmv  < 5 ppmv
Moisture < 10 ppmw < 6 ppmw < 10 ppmw
Other Halocarbons  < 100 ppmv  < 400 ppmv < 40 ppmv
Light Gases  < 200 ppmv
Acidity  < 0.1 ppmv/w  < 0.1 ppmv/w

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

Chemical & Physical Properties
Molecular Weight 188.02
Specific Volume 2.02 cu.ft/lb
Pressure @ 70ºF 100 psig
Valve Outlet CGA 660
DISS 716

 

Shipping Data
DOT Name Octafluoropropane
Hazard Class 2.2
DOT No. UN2424
DOT Label Green, Non-flammable gas
CAS No. 76-19-7
Cylinder Size Fill Weight (lbs)
44L/Size 200 100
16L/Size 80 35
7L/Size 35 15