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Formula: C4F8 or R318, Halocarbon 318

Octafluorocyclobutane is a colorless, odorless, non-flammable liquefied gas. It is shipped as a liquefied gas under its own vapor pressure (25 psig @ 70º F).

Applications

Halocarbon 318 is used for plasma etching. When it is exposed to the RF field generated in the etching process, a gas plasma is produced that will etch silicon compounds with excellent selectivity.

Grade 3 Grade 3.8 Grade 4.5 Grade 5
Purity 99.9% 99.98% 99.995% 99.999%
Nitrogen  < 80 ppmv  < 8 ppmv  < 3 ppmv
Oxygen  < 20 ppmv  < 2 ppmv  < 1 ppmv
Air (N2+O2+CO+CO2)   < 300 ppmv
Moisture  < 10 ppmv  < 10 ppmw  < 3 ppmw  < 1 ppmw
Tetrafluorocarbons < 50 ppmv
Other Fluorocarbons  < 50 ppmv < 10 ppmv  < 4 ppmv
Other Organics  < 1000 ppmv
Acidity < 0.1 ppmv/w < 0.1 ppmv/w < 0.1 ppmv/w

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

Chemical & Physical Properties
Molecular Weight 200.03
Specific Volume 1.85 cu.ft/lb
Pressure @ 70º F 25 psig
Valve Outlet CGA 660
DISS 716

 

Shipping Data
DOT Name Octafluorocyclobutane
Hazard Class 2.2
DOT No. UN 1976
DOT Label Green, Non-flammable gas
CAS No. 115-25-3
Cylinder Size Fill Weight (lbs)
44L/Size 200 100
16L/Size 80 35
7L/Size 35 15