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Formula: NF3

Nitrogen Trifluoride is a colorless, non-flammable, corrosive gas.

Applications

Applications of nitrogen trifluoride include the following:

  • In the plasma etching of silicon wafers
  • Predominantly used in the cleaning of the PECVD chambers in the high-volume production of liquid-crystal displays and silicon-based thin-film solar cells
  • Used as an oxidizer of high energy fuels
  • For the preparation of tetrafluorohydrazine
  • For the fluorination of fluorocarbon olefins

 

 

Grade 2.7 Grade 4 Grade 4.5
Purity 99.7% 99.99% 99.995%
Oxygen  < 10 ppmv  < 5 ppmv
Oxygen and Argon  < 700 ppmv
Nitrogen  < 700 ppmv  < 10 ppmv  < 5 ppmv
Carbon Dioxide  < 25 ppmv  <10 ppmv  < 3 ppmv
Carbon Monoxide  < 25 ppmv  < 0.5 ppmv
Water  < 1 ppmv  < 1 ppmv  < 1 ppmv
Carbon Tetrafluoride  < 1500 ppmv  < 40 ppmv  < 25 ppmv
Nitrous Oxide  < 50 ppmv  < 10 ppmv  < 2 ppmv
Acidity (HF)  < 1 ppmv  < 5 ppmv < 1 ppmv
Sulfur Hexafluoride  < 50 ppmv  < 1 ppmv

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

Chemical & Physical Properties
Molecular Weight 71.00
Specific Volume 5.4 cu.ft/lb
Pressure @ 70°F 1450 psig
Valve Outlet CGA 670
DISS 640

 

Shipping Information
DOT Name Nitrogen Trifluoride
Hazard Class 2.2
DOT No. UN 2451
DOT Label Non-Flammable Gas and Oxidizer
CAS No. 7783-54-2
Cylinder Size Fill Weight (lbs)
49L/Size 300 50
44L/Size 200 44