Hexafluoroethane is a colorless, noncorrosive, non-flammable gas which is extremely stable. When heated to decomposition, toxic byproducts are formed. Contact with liquid may cause frostbite. It is shipped as a liquefied gas under its own vapor pressure (415 psig @ 70ºF).
Halocarbon 116 is a versatile and selective etchant for many substrates in semiconductor manufacturing. C2F6 can selectively etch metal silicides and oxides versus their metal substrates and SiO2 over silicon. With Oxygen, C2F6 strips photoresist.
|Grade 4.5||Grade 5|
|Nitrogen||< 10 ppmv||< 5 ppmv|
|Oxygen||< 5 ppmv||< 1 ppmv|
|Carbon Monoxide||< 1 ppmv||< 1 ppmv|
|Carbon Dioxide||< 2 ppmv||< 1 ppmv|
|Moisture||< 5 ppmv||< 1 ppmv|
|Other Organics||< 25 ppmv||< 1 ppmv|
|Acidity (HF)||< 0.1 ppmv||< 0.1 ppmv|
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
|Chemical & Physical Properties|
|Specific Volume||2.8 cu.ft/lb|
|Pressure @ 70ºF||415 psig|
|Valve Outlet:||CGA 660/320
|DOT No.||UN 2193|
|DOT Label||Green, Non-flammable gas|
|Cylinder Size||Fill Weight (lbs)|