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Formula: C2F6 or R116, Halocarbon 116

Hexafluoroethane is a colorless, noncorrosive, non-flammable gas which is extremely stable. When heated to decomposition, toxic byproducts are formed. Contact with liquid may cause frostbite. It is shipped as a liquefied gas under its own vapor pressure (415 psig @ 70ºF).

Applications

Halocarbon 116 is a versatile and selective etchant for many substrates in semiconductor manufacturing. C2F6 can selectively etch metal silicides and oxides versus their metal substrates and SiO2 over silicon. With Oxygen, C2F6 strips photoresist.

Grade 4.5 Grade 5
Purity 99.995% 99.999%
Nitrogen  < 10 ppmv  < 5 ppmv
Oxygen  < 5 ppmv < 1 ppmv
Carbon Monoxide < 1 ppmv < 1 ppmv
Carbon Dioxide < 2 ppmv < 1 ppmv
Moisture  < 5 ppmv < 1 ppmv
Other Organics  < 25 ppmv < 1 ppmv
Acidity (HF) < 0.1 ppmv  < 0.1 ppmv

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

Chemical & Physical Properties
Molecular Weight 138.01
Specific Volume 2.8 cu.ft/lb
Pressure @ 70ºF 415 psig
Valve Outlet: CGA 660/320
DISS 716

 

Shipping Information
DOT Name Hexafluoroethane
Hazard Class 2.2
DOT No. UN 2193
DOT Label Green, Non-flammable gas
CAS No. 75-16-4

 

Cylinder Size Fill Weight (lbs)
44L/Size 200 95
16L/Size 80 34
7L/Size 35 15