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Corporate Address
P.O. Box 759
Hopkinton, MA 01748
Tel. 508-435-7700
Fax. 508-625-1368
Plant Address
3266 Bergey Road
Hatfield PA 19440
Tel. 215-443-9600
Fax. 215-443-2665

For product information please e-mail:
sales@efgases.com

COVID-19 Updates

Krypton and xenon: what’s the difference?

What’s the deal with krypton and xenon? And why are millions of liters of these colorless, odorless, (mostly) inert rare gases bought and used each year? Let’s dig in. Krypton and xenon are both noble gases (also known as rare gases). If you remember chemistry from high school, this puts them in the group of … Continued

Etch Gases – Methyl Fluoride

ADVANCED DIELECTRIC ETCHING IN SEMICONDUCTORS Fluorocarbons impact the environment by contributing to global warming. EFC continues to innovate lower GWP chemistries for semiconductor device manufacturing and to protect our environment.  METHYL FLUORIDE/HALOCARBON 41 (CH3F) Increasing importance for nanoscale device fabrication is the ability to control atomic scale etching with innovative and selectivity etch chem­istries. Atomic Layer … Continued

Discussion of Industrial Synthetic Routes to Hexafluoro-1,3-butadiene, C4F6

Discussion of Industrial Synthetic Routes to Hexafluoro-1,3-butadiene, C4F6 Robert G. Syvret, Ph.D., ACSF Background Various synthetic routes are known for the formation and industrial scale production of hexafluoro-1,3-butadiene (HFBD), C4F6.  This document provides a brief overview and comparison of the key attributes of the most prominent industrial routes. A preferred and advantageous route to C4F6, involving addition of … Continued